Semicon West, San Francisco, CA  -- July 16, 2001  -- IMEC, Europe's leading independent center for microelectronics and ICT R&D, has nominated Karen Maex and Marc Heyns as IMEC Fellows for their exceptional scientific research in process technology, in which they are worldwide recognized as experts in their field. The IMEC Fellow nomination is granted to researchers at IMEC as appreciation for their scientific research that is internationally recognized.

From her Ph.D. in Electrical Engineering in 1987 from the University of Leuven, Karen Maex has spent her entire career doing pioneering research in silicides and interconnection technologies. She has set up two successful Industrial Affiliation Programs on silicides and ultra-shallow junction technology and on Cu and low-k interconnection technologies, in which many companies are participating worldwide. Karen Maex is worldwide recognized as expert in these fields. She has authored or been co-author of more than 250 publications in international journals and conference proceedings, and is co-inventor of 27 patents.

Currently, Karen Maex is professor at the University of Leuven and Strategic Research Coordinator at IMEC to strengthen the fundaments of R&D activities in the fields of interconnect technologies and silicides, and advanced deposition & removal technologies.

Marc Heyns received his Ph.D. in Electrical Engineering from the University of Leuven in 1986. He is worldwide recognized as expert in the fields of ultra-clean processing, ES&H (Environment, Safety & Health) and high-k dielectrics. He initiated the International Symposium series on Ultra-Clean Processing of Silicon Surfaces  (UCPSS), which has grown out as Europe’s largest conference in this field, attracting more than 300 attendees from all over the world.

Marc Heyns has authored or been co-author of more than 300 publications in international journals and conference proceedings, and is co-inventor of 22 patents. In 1999 he received the SRC/SSA/International SEMATECH Excellence Award for Research in Manufacturing and ES&H, and in 2000 he was granted the Werner Kern award.

Currently director of IMEC’s department in ultra-clean processing, high-k dielectrics, EPI and ES&H,

Marc Heyns has set up two successful Industrial Affiliation Programs (IIAP) on ultra-clean processing and on high-k dielectrics. The research activities in the high-k program have reached worldwide top level, proven by the extensive collaboration with International Sematech.

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