January 22, 2002 --- Leuven, Belgium --- IMEC, Europe’s leading independent research center for microelectronics, nanotechnology, enabling technologies and methods for ICT systems, has nominated Wilfried Vandervorst as IMEC Fellow for his exceptional scientific contribution to the materials and component analysis, which is essential for R&D in advanced semiconductor process technologies. The IMEC Fellow nomination is granted to researchers at IMEC as appreciation for their outstanding scientific research that is internationally recognized.

After obtaining his Ph.D. in applied science in 1983 from the Katholieke Universiteit Leuven (University of Leuven), Wilfried Vandervorst has spent his entire career doing fundamental research on the use and improvement of material characterization methods for advanced semiconductor processing. He has contributed significantly in the fields of dopant profiling, with the prime emphasis on the various fundamental aspects of Secondary Ion Mass Spectrometry (SIMS), and on carrier profiling using spreading resistance probing and derived techniques. He also pioneered in device characterization based on scanning probe microscopy using the patented concepts of scanning spreading resistance microscopy and nanopotentiometry.

Wilfried Vandervorst is recognized worldwide as a leading authority in various aspects of ULSI characterization. He has authored or been co-author of more than 400 publications in internationally reviewed journals and conference proceedings, from which 45 were invited papers. He is also co-inventor of 12 patents.

In 1995, Wilfried Vandervorst was already awarded the IMEC price for outstanding achievements for building up a materials characterization laboratory within IMEC. Through his work, IMEC became a center of excellence in materials and process characterization. Currently, Wilfried Vandervorst is Group Leader Materials and Components Analyis at IMEC and visiting professor at the Katholieke Universiteit Leuven.

“Through his constant awareness and understanding of technology and materials development, Wilfried Vandervorst bridges the gap between metrology and processing aspects,” says Prof. Gilbert Declerck, President and CEO of IMEC. “That’s why he plays an essential role within IMEC’s advanced process technology programs such as high-k and low-k dielectrics, shallow junctions and overall process development.” 

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Notes to editors

About IMEC

IMEC was founded in 1984 and today is Europe’s largest independent research center in the field of microelectronics, nanotechnology, enabling design methods and technologies for ICT systems. IMEC's activities concentrate on the design technology for integrated information and communication systems; silicon process technology; silicon technology and device integration; nanotechnology, microsystems, components and packaging; solar cells; and advanced training in microelectronics. IMEC is headquartered in Leuven, Belgium, and has a staff of more than 1200 people including over 350 industrial residents and guest researchers. IMEC has a sub-0.25µm 200mm pilot line and is ISO9001 certified. Its revenue of more than 120Meuro is derived from agreements and contracts with the Flemish government and companies, the EC, MEDEA, the European Space Agency, equipment and material suppliers, and semiconductor and system-oriented companies worldwide. News from IMEC is located at www.imec.be.

For more information:

Katrien Marent

Corporate Communication Manager

IMEC, Kapeldreef 75

B- 3001 Leuven, Belgium

Tel +32 16 28 18 80 Fax +32 16 28 16 37

Email: Katrien.Marent@imec.be