Scaling-driven nanoelectronics
Interconnections (back-end)
Invent - To gain early insight in the metallization challenges of the 22-16nm technology, imec looks into creating and filling test trenches with widths down to 25nm.
Invent - To gain early insight in the metallization challenges of the 22-16nm technology, imec looks into creating and filling test trenches with widths down to 25nm.